Vol.35, No.1 [2013]

Investigation of VHF Argon Plasma at High Pressure

by Balanced Power Feeding Using Laser Thomson Scattering

Weiting CHEN, Kohei OGIWARA, Koichiro KOGE, Kentaro TOMITA, Kiichiro UCHINO and Yoshinobu KAWAI


The dependences of the VHF plasma parameters on the gas pressure and power were examined by using the Laser Thomson scattering method, where the VHF plasma was produced in the high pressure region by the balanced power feeding method. It was found that the balanced power feeding method provides a high electron density plasma with low electron temperature at high pressures. This characteristics were confirmed by calculations using a 2-dimensional simulation code.